Poorly sealed wafer cassettes can bring the following hazards:
Contamination Risk
If the wafer cassette is not properly sealed, dust, particles, and other contaminants from the external environment can enter. This can lead to contamination of the wafers, affecting the performance and quality of semiconductor devices. Contaminated wafers may result in defective products, reducing yield and increasing production costs.
If the wafer cassette is not properly sealed, dust, particles, and other contaminants from the external environment can enter. This can lead to contamination of the wafers, affecting the performance and quality of semiconductor devices. Contaminated wafers may result in defective products, reducing yield and increasing production costs.
Moisture Intrusion
A bad seal allows moisture to enter the cassette. Moisture can cause corrosion and oxidation of the wafer surface and metal interconnects. This can damage the electrical properties of the semiconductor devices and reduce their reliability and lifespan.
A bad seal allows moisture to enter the cassette. Moisture can cause corrosion and oxidation of the wafer surface and metal interconnects. This can damage the electrical properties of the semiconductor devices and reduce their reliability and lifespan.
Oxidation and Chemical Reaction
Air and moisture can also cause oxidation and chemical reactions with the materials on the wafer. This can alter the chemical composition and physical properties of the wafer, affecting its functionality.
Air and moisture can also cause oxidation and chemical reactions with the materials on the wafer. This can alter the chemical composition and physical properties of the wafer, affecting its functionality.
Damage during Transportation
Poorly sealed cassettes may not provide adequate protection during transportation. Vibrations and shocks can cause the wafers to move inside the cassette, potentially leading to scratches, cracks, or other physical damages.
Poorly sealed cassettes may not provide adequate protection during transportation. Vibrations and shocks can cause the wafers to move inside the cassette, potentially leading to scratches, cracks, or other physical damages.
Inconsistent Processing Results
If contaminants enter the cassette, it can lead to inconsistent processing results in semiconductor manufacturing. Different wafers may be affected differently, resulting in variations in device performance and making it difficult to achieve consistent quality control.
If contaminants enter the cassette, it can lead to inconsistent processing results in semiconductor manufacturing. Different wafers may be affected differently, resulting in variations in device performance and making it difficult to achieve consistent quality control.
除了密封不良，还有哪些因素会影响晶圆盒的密封性？
推荐一些检查晶圆盒密封性的工具。
晶圆盒的密封性和哪些参数有关？
